Automatic Wafer Packer/Unpacker
Model : AWS200BC68

Machine Feature:

  • 2x, 3x or 4x Wafer Cassette ( White/Metal ) Or Coin Stacked Box Handling (Option)
  • 6” & 8″ wafers Handling  (Option-4”, 5” wafer)
  • Handling of 25/13 slots Wafer Cassette
  • Advanced wafer handling build-in Vacuum  end effector (Option-Bernoulli Thin Wafer Handling)
  • Advanced Robot Transfer Arm
  • Wafer Flipper Arm (Option)
  • Build in SMART Wafer Pre-Aligner
  • Wafer ID Reader (Option)
  • Sorting Wafer, Pick & Place between Slot
  • Host Interface / Secs-Gem Compliance(Option)
  • Industrial PC control
  • Build in Macro/Micro Inspection (Option)


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