Automatic Packer/Unpacker, EFEM 8” &12’’wafers
Model : AWS3004
Machine Features:
- 12” wafer Handling
- 4x Loadport For FOSB/FOUP
- Capable to handle Jelly Jar , Coin box and FOSB.
- Detection of Wafer Protrusion from Cassette
- Wafer Cross Slot Detection
- Wafer At Cassette Mapping Graphic
- Bernoulli end effector wafer handling
- Advanced 3-axis Robot Assembly
- Intelligence Wafer Pre-alignment
- Build in OCR
- Recipe Wafer Control System
- Handheld Barcode reader for Lot Tracking
- Wafer Flipper Assembly
- Industrial PC Base Software
- Capable to Customize Handshake with 3rd Party system(Option)
