Automatic High Speed transfer of 8” &12’’wafers – AWT300LC-S

Machine Features:

  • Wafer size 8” and 12”
  • Sorting of two wafer sizes in one machine
  • Robot With build in Pre-Aligner
  • Cross slot wafer detection
  • Wafer protrusion detection
  • Touch screen display
  • Top side OCR module
  • Windows PC-Based user friendly Graphical User Interface
  • Wafer sorting selection by recipe or operator
  • Live sorting Graphical User Interface
  • Up to 260 WPH
  • Cater for 6” and 8” wafer (Option)
  • SECS/GEM Compliance (Option)
  • Bottom Wafer ID reader capability (Option)


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