Automatic Wafer Sorter with Inspection – AWS300AFA

Features:

  • 8”and 12” wafer handling
  • Wafer carrier : FOSB, FOUP, Wafer Cassette
  • 13 & 25 slots cassette capability
  • SMART wafer map and wafer cross slot detection
  • Intelligence Wafer alignment
  • User friendly GUI
  • Up to 3 IN/OUTPUT (Option)
  • 8” wafer with adapter in FOUP (Option)
  • Custom-made wafer carrier (Option)
  • Wafer carrier identification(Option RFID tag / Barcode Label)
  • SECS/GEM compliance (Option)
  • Macro inspection (Option)
  • Integrated with Microscope (Option)


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