Automatic Wafer Macro Inspection System
Automatic Wafer Macro Inspection System, Model WL-200
Features:
  • Single input and output SMIF Pod / open cassette load port
  • 8'' wafers handing
  • Safe-Care auto opener for SMIF cover
  • Handing of 25 slots wafer cassetted
  • Advanced wafer handing build-in vacuum end effector
  • Dual transfer arm
  • Build in wafer aligner
  • Wafer front / back macro inpection tilted station with gripper
  • Wafer images capture
  • FFU with ULPA filter
  • Inspection file viewing & editing
  • Industrial PC control
  • Secs-Gem compliance
  • S2-93 compliance